LAM  810-073479-215 控制板

LAM  810-073479-215 控制板

1.产 品 资 料 介 绍：

中文资料：

LAM 810-073479-215 控制板主要应用于半导体制造及高精度工业控制领域，广泛用于以下行业和设备：

1. 半导体制造

• 蚀刻设备（Etching Systems）： 作为核心控制单元，管理等离子蚀刻过程中的电源、气体流量、温度等关键参数。
• 化学气相沉积（CVD）设备： 通过精准的气体和温控控制，确保薄膜沉积质量。
• 物理气相沉积（PVD）设备： 保障溅射沉积过程中功率和气压的稳定性。

2. 显示面板生产

• OLED/LCD制程设备： 用于控制蚀刻、沉积、清洗等关键工艺，提高显示面板的良品率。
• 光刻设备（Photolithography）： 负责精准运动控制和光学系统管理，确保微细图形的曝光精度。

3. 精密工业自动化

• 高精度机床： 参与数控加工设备的电源管理、信号处理及运动控制。
• 电子封装与测试设备： 保障封装过程的温度、压力和对位精度，确保半导体封装质量。

4. 真空及等离子处理设备

• 等离子清洗系统： 监测和控制等离子能量，优化清洗效果。
• 真空镀膜设备： 维持真空环境的稳定性，提高镀膜均匀度。

该控制板在需要高精度、稳定性和可靠性的工业控制应用中具有重要作用，是LAM Research 设备中的关键组件。

英文资料：

The LAM 810-073479-215 control board is mainly used in the fields of semiconductor manufacturing and high-precision industrial control, and is widely used in the following industries and equipment:

1. Semiconductor manufacturing

Etching Systems: As the core control unit, it manages key parameters such as power supply, gas flow rate, and temperature during the plasma etching process.

Chemical vapor deposition (CVD) equipment: ensures the quality of thin film deposition through precise gas and temperature control.

Physical vapor deposition (PVD) equipment: ensures the stability of power and gas pressure during the sputtering deposition process.

2. Display panel production

OLED/LCD process equipment: used to control key processes such as etching, deposition, and cleaning to improve the yield of display panels.

Photolithography equipment: Responsible for precise motion control and optical system management to ensure the exposure accuracy of fine graphics.

3. Precision industrial automation

High precision machine tools: participate in power management, signal processing, and motion control of CNC machining equipment.

Electronic packaging and testing equipment: ensuring temperature, pressure, and alignment accuracy during the packaging process to ensure the quality of semiconductor packaging.

4. Vacuum and plasma processing equipment

Plasma cleaning system: Monitor and control plasma energy to optimize cleaning effectiveness.

Vacuum coating equipment: Maintain the stability of the vacuum environment and improve the uniformity of coating.

This control board plays an important role in industrial control applications that require high precision, stability, and reliability, and is a key component in LAM Research equipment.

2.产      品      展      示      

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