ZYGO 7702 BH5-6314激光头

ZYGO 7702 BH5-6314激光头

1.产 品 资 料 介 绍：

中文资料：

ZYGO 7702 BH5-6314 激光头是一款高精度的双频氦氖激光干涉测量光源，主要用于精密测量和位移跟踪。其应用领域广泛，涵盖半导体制造、精密机加工、计量校准等高要求行业。以下是其主要应用领域和详细介绍：

1. 半导体制造与光刻工艺

在半导体行业，纳米级的测量精度至关重要，ZYGO 7702 BH5-6314 激光头在以下方面发挥关键作用：

• 光刻机对准：用于晶圆对准和位置反馈，确保每一层电路图案的精确叠加。
• 晶圆定位与运动控制：监测晶圆台的纳米级移动，提高曝光精度。
• 掩模对准：用于光掩模版的精准定位，减少误差。
• 晶圆平整度检测：用于测量晶圆的翘曲度，优化生产工艺。

2. 精密计量与干涉测量

ZYGO 激光头广泛用于精密干涉测量仪器，如白光干涉仪、轮廓测量仪等，适用于：

• 纳米级长度测量：在计量实验室用于高精度长度基准测量，如校准量块、尺子、干涉仪等。
• 表面形貌检测：检测光学元件、镜片、玻璃基板的表面粗糙度和形状误差。
• 非接触式测量：避免传统机械测量的误差，提高测量精度。

3. 精密机械加工与CNC控制

高端机床、CNC 设备等制造系统需要高精度反馈系统，ZYGO 7702 BH5-6314 可用于：

• 数控机床的高精度位置反馈：如五轴加工中心、超精密车削机床。
• 刀具位移监测：确保刀具在纳米级精度内切削，提高加工一致性。
• 零件尺寸控制：用于在线检测，确保加工零件符合公差要求。

4. 光学元件制造与检测

在高端光学制造领域，该激光头被用于测量透镜、反射镜、光纤等的表面质量和光学参数：

• 激光干涉仪：测量透镜、棱镜、反射镜的表面平整度。
• 自由曲面检测：如车灯透镜、投影镜头等高精度光学器件的检测。
• 玻璃和显示面板测量：用于OLED、LCD 面板的翘曲度和厚度测量。

英文资料：

ZYGO 7702 BH5-6314 laser head is a high-precision dual frequency helium neon laser interferometric measurement light source, mainly used for precision measurement and displacement tracking. It has a wide range of applications, covering high demand industries such as semiconductor manufacturing, precision machining, and metrology calibration. The following are its main application areas and detailed introduction:

1. Semiconductor manufacturing and photolithography process

In the semiconductor industry, nanoscale measurement accuracy is crucial, and the ZYGO 7702 BH5-6314 laser head plays a key role in the following aspects:

Lithography machine alignment: used for wafer alignment and position feedback to ensure precise stacking of each layer circuit pattern.

Wafer positioning and motion control: Monitor the nanoscale movement of the wafer stage to improve exposure accuracy.

Mask alignment: used for precise positioning of photomask templates to reduce errors.

Wafer flatness detection: used to measure the warpage of wafers and optimize production processes.

2. Precision metrology and interferometry

ZYGO laser heads are widely used in precision interferometric measuring instruments, such as white light interferometers, contour measuring instruments, etc., and are suitable for:

Nanoscale length measurement: used in metrology laboratories for high-precision length benchmark measurement, such as calibration blocks, rulers, interferometers, etc.

Surface morphology detection: detecting the surface roughness and shape errors of optical components, lenses, and glass substrates.

Non contact measurement: avoids the errors of traditional mechanical measurement and improves measurement accuracy.

3. Precision machining and CNC control

High precision feedback systems are required for manufacturing systems such as high-end machine tools and CNC equipment. ZYGO 7702 BH5-6314 can be used for:

High precision position feedback for CNC machine tools, such as five axis machining centers and ultra precision turning machines.

Tool displacement monitoring: Ensure that the tool cuts with nanometer level accuracy, improving machining consistency.

Part size control: used for online inspection to ensure that processed parts meet tolerance requirements.

4. Manufacturing and testing of optical components

In the field of high-end optical manufacturing, this laser head is used to measure the surface quality and optical parameters of lenses, mirrors, fibers, etc

Laser interferometer: measures the surface flatness of lenses, prisms, and mirrors.

Free surface detection: detection of high-precision optical components such as car headlight lenses and projection lenses.

Glass and display panel measurement: used for measuring the warpage and thickness of OLED and LCD panels.

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