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MKS AX8410-28HC发电机模块

发布时间:2025-02-26人气:
  • MKS AX8410-28HC发电机模块
  • MKS AX8410-28HC发电机模块

MKS AX8410-28HC发电机模块

1.产 品 资 料 介 绍:

中文资料:

MKS AX8410-28HC 是 MKS Instruments 生产的一款高功率激励系统控制器模块,主要用于等离子体处理和薄膜沉积等应用。

主要特点:

  • 高功率输出: 提供高达 10 kW 的功率输出,满足大功率等离子体处理和薄膜沉积的需求。
  • 宽频率范围: 支持从 10 kHz 到 100 MHz 的频率范围,适应不同的工艺要求。
  • 高效率: 采用先进的功率转换技术,提供高效率的能量传输,降低能耗。
  • 精确控制: 配备精确的功率和频率控制功能,确保工艺过程的稳定性和一致性。

应用领域:

该激励系统控制器广泛应用于以下领域:

  • 半导体制造: 用于薄膜沉积、刻蚀和其他等离子体处理工艺。
  • 材料科学: 用于研究和开发新材料的薄膜沉积和表面处理。
  • 光伏产业: 用于太阳能电池的薄膜沉积和表面处理。
  • 显示技术: 用于液晶显示器和有机发光二极管(OLED)的制造过程。

维护与更换:

长期使用可能导致模块性能下降,定期检查和更换该模块可以确保工艺过程的稳定性和高效运行。

英文资料:

MKS AX8410-28HC is a high-power excitation system controller module produced by MKS Instruments, mainly used for applications such as plasma treatment and thin film deposition.

Main features:

High power output: Provides up to 10 kW of power output to meet the needs of high-power plasma processing and thin film deposition.

Wide frequency range: Supports a frequency range from 10 kHz to 100 MHz to meet different process requirements.

High efficiency: Adopting advanced power conversion technology to provide efficient energy transmission and reduce energy consumption.

Precise control: equipped with precise power and frequency control functions to ensure the stability and consistency of the process.

Application areas:

This incentive system controller is widely used in the following fields:

Semiconductor manufacturing: used for thin film deposition, etching, and other plasma treatment processes.

Materials Science: Used for researching and developing thin film deposition and surface treatment of new materials.

Photovoltaic industry: used for thin film deposition and surface treatment of solar cells.

Display technology: used in the manufacturing process of liquid crystal displays and organic light-emitting diodes (OLEDs).

Maintenance and replacement:

Long term use may lead to a decrease in module performance. Regular inspection and replacement of the module can ensure the stability and efficient operation of the process.

2.产      品      展      示      

MKS AX8410-28HC.webp.jpg

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