ASYST SMIF LPT2200晶圆传输系统

ASYST SMIF LPT2200晶圆传输系统

1.产 品 资 料 介 绍：

中文资料：

ASYST SMIF LPT2200 是由 Asyst Technologies 公司推出的一款晶圆传输系统，旨在实现半导体制造过程中晶圆的自动化、高效、安全传输。

主要特点：

• 高精度传输：采用先进的运动控制技术，确保晶圆在传输过程中的精确定位和对准，提高生产效率和产品质量。

• 兼容性强：设计用于集成 SMIF-Pod 晶圆盒的加载和卸载，适用于多种 200mm 和 150mm 晶圆加工和计量设备。

• 紧凑设计：结构紧凑，节省空间，便于集成到现有系统中。

• 用户友好：配备图形用户界面（GUI），操作简便，易于监控和调整系统参数。

应用领域：

• 半导体制造：用于晶圆的搬运、加载和卸载，确保在加工和计量设备之间的高效传输。

• 计量和检测：在计量和检测工具中，实现晶圆的精确传输和定位。

• 自动化生产线：在自动化生产线中，实现晶圆的高效传输和处理，提高生产效率。

ASYST SMIF LPT2200 以其卓越的性能和可靠性，广泛应用于半导体制造领域，助力企业实现高效、精确的晶圆传输和处理。

英文资料：

ASYST SMIF LPT2200 is a wafer transfer system launched by Asyst Technologies, aimed at achieving automated, efficient, and secure transfer of wafers in the semiconductor manufacturing process.

Main features:

High precision transmission: Adopting advanced motion control technology to ensure precise positioning and alignment of wafers during transmission, improving production efficiency and product quality.

Strong compatibility: Designed for integrated loading and unloading of SMIF Pod wafer boxes, suitable for various 200mm and 150mm wafer processing and metrology equipment.

Compact design: With a compact structure, it saves space and is easy to integrate into existing systems.

User friendly: Equipped with a graphical user interface (GUI), easy to operate, and convenient to monitor and adjust system parameters.

Application areas:

Semiconductor manufacturing: used for wafer handling, loading, and unloading to ensure efficient transfer between processing and measuring equipment.

Measurement and testing: In measurement and testing tools, precise transfer and positioning of wafers are achieved.

Automated production line: In an automated production line, efficient transfer and processing of wafers are achieved to improve production efficiency.

The ASYST SMIF LPT2200 is widely used in the semiconductor manufacturing field due to its excellent performance and reliability, helping enterprises achieve efficient and accurate wafer transfer and processing.

2.产      品      展      示      

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