AE MDX-L12直流发电机

AE  MDX-L12直流发电机

1.产 品 资 料 介 绍：

中文资料：

Advanced Energy（AE）公司的 MDX-L12 系列直流电源是一种高性能的磁控管驱动电源，广泛应用于溅射镀膜等真空镀膜工艺中。

主要特点：

• 高功率输出：MDX-L12 系列提供高达 12 kW 的功率输出，满足大面积镀膜和高生产率需求。

• 精确控制：具备精确的电流、电压和功率调节功能，确保镀膜过程的稳定性和一致性。

• 优异的灭弧性能：采用先进的灭弧技术，减少弧光放电对镀膜质量的影响，提高产品良率。

• 低输出纹波：输出纹波低，确保镀膜层的均匀性和质量。

• 紧凑设计：结构紧凑，便于集成到现有的真空镀膜系统中。

应用领域：

• 磁控管溅射：作为磁控管溅射的电源，广泛应用于半导体、光学和装饰性镀膜等领域。

• 偏压电源：在射频溅射和刻蚀系统中，作为偏压电源使用，提供精确的偏压控制。

• 实验室研究：由于其精确的控制性能和高可靠性，适用于各种研究和开发应用。

MDX-L12 系列直流电源以其高可靠性和优异性能，成为真空镀膜行业的领先产品，满足各种复杂工艺的需求。

英文资料：

The MDX-L12 series DC power supply from Advanced Energy (AE) is a high-performance magnetron drive power supply widely used in vacuum coating processes such as sputtering coating.

Main features:

High power output: The MDX-L12 series provides up to 12 kW of power output, meeting the needs of large-area coating and high productivity.

Precise control: With precise current, voltage, and power regulation functions, it ensures the stability and consistency of the coating process.

Excellent arc extinguishing performance: Advanced arc extinguishing technology is adopted to reduce the impact of arc discharge on coating quality and improve product yield.

Low output ripple: Low output ripple ensures the uniformity and quality of the coating layer.

Compact design: The structure is compact and easy to integrate into existing vacuum coating systems.

Application areas:

Magnetron sputtering: As a power source for magnetron sputtering, it is widely used in fields such as semiconductors, optics, and decorative coatings.

Bias power supply: Used as a bias power supply in RF sputtering and etching systems, providing precise bias control.

Laboratory research: Due to its precise control performance and high reliability, it is suitable for various research and development applications.

The MDX-L12 series DC power supply has become a leading product in the vacuum coating industry due to its high reliability and excellent performance, meeting the needs of various complex processes.

2.产      品      展      示      

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