MKS AX7695PSK-10远程等离子源

MKS AX7695PSK-10远程等离子源

1.产 品 资 料 介 绍：

中文资料：

MKS AX7695PSK-10 是一款高性能远程等离子源，广泛应用于半导体、显示面板和太阳能电池制造中的表面处理和清洁工艺。

主要特点：

• 高效等离子解离：能够在 1 至 10 托（Torr）范围内提供超过 95% 的气体解离率，提高工艺效率。
• 高流量处理能力：支持高达 6.0 slm（标准升每分钟）的气体流量，适用于高流量工艺需求。
• 集成式设计：内置石英真空腔室和射频电源，结构紧凑，便于直接安装在工艺腔室上。
• 多气体兼容性：可处理 O₂、N₂、H₂、H₂O 等多种气体，适用于化学气相沉积（CVD）、刻蚀、去胶等工艺。
• 智能控制：支持模拟和 EtherCAT 通信，便于集成到自动化控制系统中，实现精准控制。

应用领域：

• 半导体制造：用于晶圆表面的高密度等离子体处理，提高刻蚀和沉积工艺的均匀性。
• 平板显示器生产：用于清洁和表面改性，提高显示器制造良率。
• 太阳能电池制造：增强太阳能电池的表面处理工艺，提高光电转换效率。

MKS AX7695PSK-10 以其高效、可靠的性能，成为现代高端制造行业中关键的等离子源设备之一。

英文资料：

MKS AX7695PSK-10 is a high-performance remote plasma source widely used in surface treatment and cleaning processes in semiconductor, display panel, and solar cell manufacturing.

Main features:

Efficient plasma dissociation: capable of providing over 95% gas dissociation rate in the range of 1 to 10 Torr, improving process efficiency.

High flow processing capability: Supports gas flow rates up to 6.0 slm (standard liters per minute), suitable for high flow process requirements.

Integrated design: Built in quartz vacuum chamber and RF power supply, compact structure, easy to install directly on the process chamber.

Multi gas compatibility: capable of handling various gases such as O ₂, N ₂, H ₂, H ₂ O, etc., suitable for chemical vapor deposition (CVD), etching, de gluing and other processes.

Intelligent control: Supports simulation and EtherCAT communication, making it easy to integrate into automation control systems and achieve precise control.

Application areas:

Semiconductor manufacturing: used for high-density plasma treatment of wafer surfaces to improve the uniformity of etching and deposition processes.

Flat panel display production: used for cleaning and surface modification to improve display manufacturing yield.

Solar cell manufacturing: Enhance the surface treatment process of solar cells to improve the photoelectric conversion efficiency.

MKS AX7695PSK-10 has become one of the key plasma source equipment in modern high-end manufacturing industry due to its efficient and reliable performance.

2.产      品      展      示      

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