MKS AX8407 臭氧气体发生器
1.产 品 资 料 介 绍:
中文资料:
MKS Instruments 的 SEMOZON® AX8407 是一款高浓度、高流量的臭氧发生器,采用无声放电技术将纯氧转化为臭氧,具有高输出和高浓度水平。该设备仅需极少量的氮气掺杂,氮氧化物(NOx)排放极低,适用于半导体制造等高要求应用。
主要技术规格:
- 臭氧输出:最高可达 335 g/Nm³
- 流量范围:5 至 40 slm
- 原料气体:
- 氧气:6 级或更高纯度 O₂
- 氮气:100 至 1000 ppm,5 级或更高纯度 N₂
- 腔室压力:15 至 45 psig(100 至 310 kPa)
- 冷却水温度:5 至 25°C
- 控制方式:前面板控制和远程操作
- 电源要求:208 VAC(±10%),三相,无中性线,15A,50/60 Hz
- 尺寸:483 × 445 × 267 mm(宽 × 深 × 高)
- 重量:59 kg(130 磅)
应用领域:
AX8407 主要用于半导体制造,包括:
- 化学气相沉积(CVD)
- 光刻胶去除
- 晶圆清洗
- 先进封装和显示面板制造
该设备以其高效、低污染的特性,成为高科技制造工艺中可靠的臭氧气源。
英文资料:
SEMOZON from MKS Instruments ® AX8407 is a high concentration, high flow ozone generator that uses silent discharge technology to convert pure oxygen into ozone, with high output and high concentration levels. This device requires only a minimal amount of nitrogen doping and has extremely low nitrogen oxide (NOx) emissions, making it suitable for high demand applications such as semiconductor manufacturing.
Main technical specifications:
Ozone output: up to 335 g/Nm ³
Flow range: 5 to 40 slm
Raw material gas:
Oxygen: Grade 6 or higher purity O ₂
Nitrogen: 100 to 1000 ppm, grade 5 or higher purity N ₂
Chamber pressure: 15 to 45 PSI (100 to 310 kPa)
Cooling water temperature: 5 to 25 ° C
Control mode: front panel control and remote operation
Power requirements: 208 VAC (± 10%), three-phase, no neutral wire, 15A, 50/60 Hz
Size: 483 × 445 × 267 mm (width × depth × height)
Weight: 59 kg (130 pounds)
Application areas:
AX8407 is mainly used in semiconductor manufacturing, including:
Chemical Vapor Deposition (CVD)
Photoresist removal
Wafer Cleaning
Advanced packaging and display panel manufacturing
This device, with its high efficiency and low pollution characteristics, has become a reliable source of ozone gas in high-tech manufacturing processes.
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