ZYGO ZMI-4004 测量板

ZYGO ZMI-4004  测量板

1.产 品 资 料 介 绍：

中文资料：

ZYGO ZMI-4004 是一款高精度测量板，主要用于干涉测量系统中，以实现纳米级的位移测量和精确定位。ZYGO 公司专注于超精密测量和光学干涉技术，其 ZMI 系列产品广泛应用于半导体制造、光学加工、计量和高精度运动控制等领域。

ZYGO ZMI-4004 测量板特点

1. 高精度测量

   • 采用激光干涉测量技术，可实现纳米级甚至更高分辨率的位移测量。
   • 适用于高精度定位和运动控制应用。

2. 多通道支持

   • ZMI-4004 可能支持多个干涉测量通道，适用于复杂的多轴测量系统。

3. 实时信号处理

   • 具备高性能信号处理功能，可提供快速、准确的测量反馈。

4. 兼容性

   • 兼容 ZYGO 的激光干涉仪系统，如 ZMI 系列干涉仪和光学测量系统。

5. 应用场景广泛

   • 半导体制造（晶圆对准、光刻机精密运动控制）
   • 精密机械加工（纳米级定位）
   • 科研实验（高分辨率位移测量）
   • 航空航天精密测量系统

英文资料：

ZYGO ZMI-4004 is a high-precision measurement board mainly used in interferometric measurement systems to achieve nanoscale displacement measurement and precise positioning. ZYGO company focuses on ultra precision measurement and optical interference technology, and its ZMI series products are widely used in fields such as semiconductor manufacturing, optical processing, metrology, and high-precision motion control.

Characteristics of ZYGO ZMI-4004 measuring board

high precision measurement

By using laser interferometry measurement technology, displacement measurement at the nanometer level or even higher resolution can be achieved.

Suitable for high-precision positioning and motion control applications.

Multi channel support

ZMI-4004 may support multiple interferometric measurement channels and is suitable for complex multi axis measurement systems.

Real-time signal processing

Equipped with high-performance signal processing capabilities, it can provide fast and accurate measurement feedback.

compatibility

Compatible with ZYGO laser interferometer systems, such as ZMI series interferometers and optical measurement systems.

Widely applicable scenarios

Semiconductor manufacturing (wafer alignment, precision motion control of lithography machines)

Precision machining (nanometer level positioning)

Scientific research experiment (high-resolution displacement measurement)

Aerospace Precision Measurement System

2.产      品      展      示      

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