AMAT 0010-23716气门执行器
1.产 品 资 料 介 绍：
中文资料：
关于 AMAT（Applied Materials）0010-23716 气门执行器，以下是详细的技术与应用信息：
一、基本信息
| 项目 | 内容 |
|---|---|
| 制造商 | Applied Materials（应用材料公司） |
| 部件型号 | 0010-23716 |
| 设备类型 | 气门执行器（Valve Actuator） |
| 典型用途 | 半导体设备中的气体流量控制系统，如 CVD、PVD、Etch 等工艺 |
二、功能与用途
该执行器通常作为 真空阀门或气体阀门的驱动单元，在 AMAT 的各种真空系统设备中负责精密控制气体或真空的开关状态。
主要功能：
控制过程气体的启闭（如氩气、氟化物、氮气等）
实现高速、精准的气体切换
配合 MFC（质量流量控制器）或压力控制系统使用
支持高真空或超高真空环境下的操作
三、可能规格（推测性信息，根据AMAT执行器常见标准）：
| 项目 | 参数说明 |
|---|---|
| 驱动方式 | 气动（Pneumatic）或电动（某些版本） |
| 响应时间 | < 100ms（高速气体响应需求） |
| 材质 | 不锈钢/铝合金外壳，适用于洁净室环境 |
| 接口 | 与 AMAT 腔体控制系统（如 CENTURA、ENDURA）集成 |
| 适配阀门类型 | Gate Valve / Pendulum Valve / Bypass Valve 等 |
| 真空兼容性 | 高真空级别（HV）或超高真空（UHV）等级 |
英文资料：
Regarding the AMAT (Applied Materials) 0010-23716 valve actuator, the following is detailed technical and application information:
1、 Basic Information
Project Content
Manufacturer Applied Materials
Component model 0010-23716
Equipment type: Valve actuator
Gas flow control systems in typical semiconductor equipment, such as CVD, PVD, Etch and other processes
2、 Function and purpose
This actuator is usually used as the driving unit for vacuum valves or gas valves, responsible for precise control of the on/off status of gas or vacuum in various vacuum system equipment of AMAT.
Main functions:
Control the opening and closing of process gases (such as argon, fluoride, nitrogen, etc.)
Realize high-speed and precise gas switching
Used in conjunction with MFC (Mass Flow Controller) or pressure control system
Support operation in high vacuum or ultra-high vacuum environments
3、 Possible specifications (speculative information, based on common standards for AMAT actuators):
Project parameter description
Drive mode: Pneumatic or electric (some versions)
Response time<100ms (high-speed gas response requirement)
Material: Stainless steel/aluminum alloy shell, suitable for clean room environment
Integration of interfaces with AMAT cavity control systems (such as CENTURA, ENDURA)
Suitable for valve types such as Gate Valve, Pendulum Valve, Bypass Valve, etc
Vacuum compatibility high vacuum level (HV) or ultra-high vacuum level (UHV)
2.产 品 展 示
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